- Tests : high vacumn, temperature
- External dimensions (chamber only): 4200X10000X4400 mm(WxDxH)
- Internal useful dimensions : 3900x4400 mm (∅xl)
- Internal useful volume : 52m3
- Temperature range : -190℃/+150℃
- Temperature variation rate :
- 1℃/min from -100℃ up to +100℃
- 1℃/min from +100℃ down to -100℃
- Vacumn limit : 1x10-6 mbar
- Special features : internal DUT frame with horizontality control system